Call for Abstracts Deadline: February 15, 2024
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Committee

ALD Program Chairs:

ALE Program Chairs:

Program Chair:
Mikko Ritala
(University of Helsinki, Finland)

Program Co-Chair:
Markku Leskelä
(University of Helsinki, Finland)

Program Chair:
Fred Roozeboom
(University of Twente, The Netherlands)

Program Co-Chair:
Dmitry Suyatin
(AlixLabs AB, Sweden)

ALD Program Committee:

  • Noureddine Adjeroud (LIST, Luxembourg)
  • Sumit Agarwal (Colorado School of Mines, USA)
  • Parag Banerjee (University of Central Florida, USA)
  • Sean Barry (Carleton University, Canada)
  • Stacey Bent (Stanford University, USA)
  • Haripin Chandra (Versum/EMD, USA)
  • Robert Clark (TEL, USA)
  • Scott Clendenning (Intel, USA)
  • John F. Conley, Jr. (Oregon State University, USA)
  • Arrelaine Dameron (Forge Nano, USA)
  • Neil Dasgupta (University of Michigan, USA)
  • Jolien Dendooven (Ghent University, Belgium)
  • Christophe Detavernier (Ghent University, Belgium)
  • Charles Dezelah (ASM Microchemistry, USA)
  • Christian Dussarrat (Air Liquide, France)
  • Simon Elliott (Schrödinger, Ireland)
  • Benjamin Greenberg (Naval Research Lab, USA)
  • Dennis Hausmann (Lam Research, USA)
  • Jiyoung Kim (University of Texas at Dallas, USA)
  • Mato Knez (Nanogune, Spain)
  • Harm Knoops (Oxford Instruments, UK)
  • Luca Lamagna (ST Microelectronics, Italy)
  • Han-Bo-Ram Lee (Incheon National University, South Korea)
  • Markku Leskelä (University of Helsinki, Finland)
  • Wei-Min Li (Lead Micro, China)
  • HanJin Lim (Samsung, South Korea)
  • Pinyen Lin (TSMC, Taiwan)
  • Adrie Mackus (Eindhoven University of Technology, The Netherlands)
  • Michael McSwiney (Applied Materials, USA)
  • Chang-Yong Nam (Brookhaven National Lab, USA)
  • Michael Nolan (Tyndall University, Ireland)
  • Jin-Seong Park (Hanyang University, South Korea)
  • Henrik Pedersen (Linköping University, Sweden)
  • Tero Pilvi (Picosun, Finland)
  • Paul Poodt (SparkNano, The Netherlands)
  • Matti Putkonen (University of Helsinki, Finland)
  • Riikka Puurunen (Aalto University, Finland)
  • Mikko Ritala (University of Helsinki, Finland)
  • Seung Wook Ryu (SK Hynix, South Korea)
  • Atsushi Sakurai (Adeka Corporation, Japan)
  • Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
  • Nathanaelle Schneider (CNRS, France)
  • Uwe Schroeder (Namlab, Germany)
  • Sami Sneck (Beneq, Finland)
  • Ganesh Sundaram (Veeco, USA)
  • Christophe Vallee (SUNY POLY, France)
  • Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
  • Paul Williams (Pegasus Chemicals, UK)
  • Charles Winter (Wayne State University, USA)
  • Seung-Yeol Yang (Samsung, South Korea)
  • Angel Yanguas-Gil (Argonne National Lab, USA)

ALD International Advisory Committee:

  • Annelies Delabie (IMEC, Belgium)
  • Anjana Devi (Ruhr-University Bochum, Germany)
  • Jeffrey Elam (Argonne National Lab, USA)
  • Steven George (University of Colorado at Boulder, USA)
  • Cheol Seong Hwang (Seoul National University, South Korea)
  • Hyeongtag Jeon (Hanyang University, South Korea)
  • Erwin Kessels (Eindhoven University of Technology, The Netherlands)
  • Hyungjun Kim (Yonsei University, South Korea)
  • Sang In Lee (Synos Foundation, USA)
  • Markku Leskelä (University of Helsinki, Finland)
  • Gregory N. Parsons (North Carolina State University, USA)
  • Viljami Pore (ASM, Finland)

ALD Steering Committee:

  • Steven George (University of Colorado at Boulder, USA)
  • Erwin Kessels (University of Eindhoven, The Netherlands)
  • Hyungjun Kim (Yonsei University, South Korea)
  • Gregory N. Parsons (North Carolina State University, USA

ALE Program Committee:

  • Sumit Agarwal (Colorado School of Mines, USA)
  • Stacey Bent (Stanford Univ., USA)
  • Andrew Cavanagh (University of Colorado at Boulder, USA)
  • Heeyeop Chae (Sungkyunkwan University, South Korea)
  • Jane Chang (University of California, Los Angeles)
  • Sung-Il Cho (Samsung, South Korea)
  • Jean-Francois de Marneffe (IMEC, Belgium)
  • Rémi Dussart (GREMI, Polytech Orleans, France)
  • Elina Färm (ASM Microchemistry Oy, Finland)
  • Jeff Elam (Argonne National Laboratory, USA)
  • Steve George (University of Colorado at Boulder, USA)
  • Satoshi Hamaguchi (Osaka University, Japan)
  • Craig Huffman (Oxford Instruments, UK)
  • Yohei Ishii (Hitachi High Technologies USA)
  • Eric Joseph (IBM, USA)
  • Keren Kanarik (Lam Research, USA)
  • Erwin Kessels (Eindhoven University of Technology, The Netherlands)
  • Harm Knoops (Oxford Instruments, UK)
  • Thorsten Lill (Clarycon Nanotechnology Research, USA)
  • Anil Mane (Argonne National Lab, USA)
  • Gottlieb Oehrlein (University of Maryland, USA)
  • Venkat Pallem (Air Liquide, USA)
  • Tero Pilvi (Picosun Oy, Finland)
  • Nicolas Possémé (Leti, France)
  • Angelique Raley (TEL, USA)
  • Tatayana Rakhimova (Lomonosov Moscow State University Skobeltsyn Institute, Russia)
  • Fred Roozeboom (University of Twente, The Netherlands)
  • Dmitry Suyatin (Lund University, Sweden)
  • Tetsuya Tatsumi (Sony Corp., Japan)
  • Tristan Tronic (Intel, USA)
  • Geun Young Yeom (Sungkyunkwan University, South Korea)

ALE Steering Committee:

  • Craig Huffman (Micron, USA)
  • Eric Joseph (IBM, USA)
  • Keren Kanarik (Lam Research, USA)
  • Steve George (University of Colorado at Boulder, USA)

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Key Dates

Abstract Submission Deadline:
February 15, 2024

Author Acceptance Notifications:
April 3, 2024

Early Registration Deadline:
June 1, 2024

Hotel Reservation Deadline:
June 30, 2024

Manuscript Deadline:
November 1, 2024

Downloads

  • Code of Conduct (PDF)
  • Copyright Agreement (PDF)
  • Presentation Guidelines
  • Sponsor & Exhibit Form (PDF)

Contact

AVS
Della Miller

Event Manager
110 Yellowstone Dr. Suite 120
Chico, CA 95973
(530) 896-0477
della@avs.org

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