ALE Program Chairs:
Program Chair:
Mikko Ritala
(University of Helsinki, Finland)
Program Co-Chair:
Markku Leskelä
(University of Helsinki, Finland)
Program Chair:
Fred Roozeboom
(University of Twente, The Netherlands)
Program Co-Chair:
Dmitry Suyatin
(AlixLabs AB, Sweden)
ALD Program Committee:
- Noureddine Adjeroud (LIST, Luxembourg)
- Sumit Agarwal (Colorado School of Mines, USA)
- Parag Banerjee (University of Central Florida, USA)
- Sean Barry (Carleton University, Canada)
- Stacey Bent (Stanford University, USA)
- Haripin Chandra (Versum/EMD, USA)
- Robert Clark (TEL, USA)
- Scott Clendenning (Intel, USA)
- John F. Conley, Jr. (Oregon State University, USA)
- Arrelaine Dameron (Forge Nano, USA)
- Neil Dasgupta (University of Michigan, USA)
- Jolien Dendooven (Ghent University, Belgium)
- Christophe Detavernier (Ghent University, Belgium)
- Charles Dezelah (ASM Microchemistry, USA)
- Christian Dussarrat (Air Liquide, France)
- Simon Elliott (Schrödinger, Ireland)
- Benjamin Greenberg (Naval Research Lab, USA)
- Dennis Hausmann (Lam Research, USA)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Mato Knez (Nanogune, Spain)
- Harm Knoops (Oxford Instruments, UK)
- Luca Lamagna (ST Microelectronics, Italy)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Markku Leskelä (University of Helsinki, Finland)
- Wei-Min Li (Lead Micro, China)
- HanJin Lim (Samsung, South Korea)
- Pinyen Lin (TSMC, Taiwan)
- Adrie Mackus (Eindhoven University of Technology, The Netherlands)
- Michael McSwiney (Applied Materials, USA)
- Chang-Yong Nam (Brookhaven National Lab, USA)
- Michael Nolan (Tyndall University, Ireland)
- Jin-Seong Park (Hanyang University, South Korea)
- Henrik Pedersen (Linköping University, Sweden)
- Tero Pilvi (Picosun, Finland)
- Paul Poodt (SparkNano, The Netherlands)
- Matti Putkonen (University of Helsinki, Finland)
- Riikka Puurunen (Aalto University, Finland)
- Mikko Ritala (University of Helsinki, Finland)
- Seung Wook Ryu (SK Hynix, South Korea)
- Atsushi Sakurai (Adeka Corporation, Japan)
- Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
- Nathanaelle Schneider (CNRS, France)
- Uwe Schroeder (Namlab, Germany)
- Sami Sneck (Beneq, Finland)
- Ganesh Sundaram (Veeco, USA)
- Christophe Vallee (SUNY POLY, France)
- Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
- Paul Williams (Pegasus Chemicals, UK)
- Charles Winter (Wayne State University, USA)
- Seung-Yeol Yang (Samsung, South Korea)
- Angel Yanguas-Gil (Argonne National Lab, USA)
ALD International Advisory Committee:
- Annelies Delabie (IMEC, Belgium)
- Anjana Devi (Ruhr-University Bochum, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA
ALE Program Committee:
- Sumit Agarwal (Colorado School of Mines, USA)
- Stacey Bent (Stanford Univ., USA)
- Andrew Cavanagh (University of Colorado at Boulder, USA)
- Heeyeop Chae (Sungkyunkwan University, South Korea)
- Jane Chang (University of California, Los Angeles)
- Sung-Il Cho (Samsung, South Korea)
- Jean-Francois de Marneffe (IMEC, Belgium)
- Rémi Dussart (GREMI, Polytech Orleans, France)
- Elina Färm (ASM Microchemistry Oy, Finland)
- Jeff Elam (Argonne National Laboratory, USA)
- Steve George (University of Colorado at Boulder, USA)
- Satoshi Hamaguchi (Osaka University, Japan)
- Craig Huffman (Oxford Instruments, UK)
- Yohei Ishii (Hitachi High Technologies USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Harm Knoops (Oxford Instruments, UK)
- Thorsten Lill (Clarycon Nanotechnology Research, USA)
- Anil Mane (Argonne National Lab, USA)
- Gottlieb Oehrlein (University of Maryland, USA)
- Venkat Pallem (Air Liquide, USA)
- Tero Pilvi (Picosun Oy, Finland)
- Nicolas Possémé (Leti, France)
- Angelique Raley (TEL, USA)
- Tatayana Rakhimova (Lomonosov Moscow State University Skobeltsyn Institute, Russia)
- Fred Roozeboom (University of Twente, The Netherlands)
- Dmitry Suyatin (Lund University, Sweden)
- Tetsuya Tatsumi (Sony Corp., Japan)
- Tristan Tronic (Intel, USA)
- Geun Young Yeom (Sungkyunkwan University, South Korea)
ALE Steering Committee:
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Steve George (University of Colorado at Boulder, USA)